Flatness: TTV _ 7 microns
LTV (5x5mm2; 95%; 2mm edge exclusion) _ 1.5 microns
Warp: _ 40 microns
Curie Temperature: 1133 - 1145°C (+/- 3 °C)
Frontside: Mechano-chemical mirror polished
No pits or scratches
Backside: Ra = 0,2 - 0,7 microns
Flat length: 32.0 mm (+/- 3 mm)
Flat orientation: perpendicular to Z axis (+/-0.30 degrees)
Edges: All edges rounded
AS/OS